EtherCAT-compatible mass flow controller MC-5000C
It is a high-precision mass flow controller compatible with EtherCAT.
Mass flow controller compatible with EtherCAT, adopting our unique self-temperature compensation sensor (patented in the US and Japan) and supporting various surface mount standards (1.125 inches). 【Features】 ○ Digital mass flow controller with digital interface (SEMI E54. 20-1108) ○ High performance (metal seal, piezo valve, high precision, multi-gas compatible) ○ Operates on a single power supply of +11 to 24V DC ○ Supports various surface mount standards (SEMI STD.) ○ Adopts Lintec's unique self-temperature compensation sensor (patented in the US and Japan) ○ Fully digital operation ○ Ultra-high performance with a width of 1.125 inches ○ Compatible with surface mount gas interfaces *For other functions and details, please download the catalog.
- Company：リンテック 東京営業所
- Price：100,000 yen-500,000 yen
